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• Polycrystalline silicon (refer to SEMI M16 or JEITA EM-3601A)
SEMI T9-0200 (Reapproved 1104)
SEMI D18 — Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates
データ品質とそれに関連する用語を理解するための取り組みについての背景と説明。
4 Because no chuck is used as a measurement reference
M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers StdTpc-300 mm Packaging • Polycrystalline silicon (refer toThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high density integrated