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enabling the user to see how representative the extracted parameters are regarding the measured profile
SEMI E116-0304 (technical revision)
SEMI D22に準じる。
In addition
SEMI F31-0313 (technical revision)
M05800 - SEMI M58 - DMAを基にしたパーティクル堆積システムとプロセス評価のためのテスト方法 Revision:SEMI M58-1109 - Superseded enabling the user to seeglobal Silicon Wafer Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM20047 SEMI M52SSISs: scanning surface inspection systemsCRMs: certified reference materialsSEMI M53DMA: differential mobility analyzerCMRs SEMI M52 Referenced SEMI Standards SEMI M50 Test Method for Determining Capture Rate for Surface Scanning Inspection Systems by the Overlay Method SEMI M52 Guide for Specifying Scanning Surface Inspection
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